JPS6240435Y2 - - Google Patents

Info

Publication number
JPS6240435Y2
JPS6240435Y2 JP1982054293U JP5429382U JPS6240435Y2 JP S6240435 Y2 JPS6240435 Y2 JP S6240435Y2 JP 1982054293 U JP1982054293 U JP 1982054293U JP 5429382 U JP5429382 U JP 5429382U JP S6240435 Y2 JPS6240435 Y2 JP S6240435Y2
Authority
JP
Japan
Prior art keywords
wafer
bottom plate
ribs
container
upper wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982054293U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58158437U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5429382U priority Critical patent/JPS58158437U/ja
Publication of JPS58158437U publication Critical patent/JPS58158437U/ja
Application granted granted Critical
Publication of JPS6240435Y2 publication Critical patent/JPS6240435Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Packaging For Recording Disks (AREA)
  • Packaging Frangible Articles (AREA)
  • Containers Having Bodies Formed In One Piece (AREA)
JP5429382U 1982-04-16 1982-04-16 ウエハ−容器 Granted JPS58158437U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5429382U JPS58158437U (ja) 1982-04-16 1982-04-16 ウエハ−容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5429382U JPS58158437U (ja) 1982-04-16 1982-04-16 ウエハ−容器

Publications (2)

Publication Number Publication Date
JPS58158437U JPS58158437U (ja) 1983-10-22
JPS6240435Y2 true JPS6240435Y2 (en]) 1987-10-16

Family

ID=30064920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5429382U Granted JPS58158437U (ja) 1982-04-16 1982-04-16 ウエハ−容器

Country Status (1)

Country Link
JP (1) JPS58158437U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104995728A (zh) * 2013-02-11 2015-10-21 阿基里斯株式会社 附有带框的晶片用的托盘

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006303246A (ja) * 2005-04-21 2006-11-02 Miraial Kk 枚葉収納容器
WO2007092477A2 (en) * 2006-02-03 2007-08-16 Entegris, Inc. Shock absorbing substrate container
JP7648406B2 (ja) * 2021-03-03 2025-03-18 株式会社ディスコ カセット

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS522104B2 (en]) * 1971-08-19 1977-01-19
DE2534074A1 (de) * 1975-07-30 1977-02-17 Wacker Chemitronic Stapelbare paletten-verpackung fuer halbleiterscheiben
JPS5315253U (en]) * 1976-07-20 1978-02-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104995728A (zh) * 2013-02-11 2015-10-21 阿基里斯株式会社 附有带框的晶片用的托盘

Also Published As

Publication number Publication date
JPS58158437U (ja) 1983-10-22

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